Onto Innovation Acquires Lumina Instruments and Kulicke & Soffa Lithography Business

October 31, 2024

Onto Innovation Inc. has acquired Lumina Instruments, Inc. (Milpitas, CA) and the lithography business of Kulicke & Soffa Industries, Inc. The tuck‑in acquisitions expand Onto Innovation’s inspection and panel lithography capabilities, add patents and R&D personnel, and are expected to generate up to $100 million of additional annual revenue within three years.

Buyers
Onto Innovation Inc.
Targets
Lumina Instruments, Inc., Lithography business of Kulicke and Soffa Industries, Inc.
Sellers
Kulicke and Soffa Industries, Inc.
Industry
Manufacturing
Location
California, United States
Transaction Type
Buyout

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