Onto Innovation Completes 27% Minority Investment in Rigaku Holdings

August 10, 2026

Onto Innovation completed its previously announced acquisition of a 27% minority equity stake in Rigaku Holdings Corporation. The investment, from Atom Investment, L.P. (an affiliate of Carlyle), is intended to deepen collaboration for next-generation X-ray based process control solutions for semiconductor manufacturing.

Buyers
Onto Innovation Inc., Atom Investment, L.P. (affiliate of Carlyle)
Targets
Rigaku Holdings Corporation
Sellers
Atom Investment, L.P.
Platforms
Industry
IT Services
Location
United States
Transaction Type
Growth capital

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