Onto Innovation Completes 27% Minority Investment in Rigaku Holdings
August 10, 2026
Onto Innovation completed its previously announced acquisition of a 27% minority equity stake in Rigaku Holdings Corporation. The investment, from Atom Investment, L.P. (an affiliate of Carlyle), is intended to deepen collaboration for next-generation X-ray based process control solutions for semiconductor manufacturing.
- Buyers
- Onto Innovation Inc., Atom Investment, L.P. (affiliate of Carlyle)
- Targets
- Rigaku Holdings Corporation
- Sellers
- Atom Investment, L.P.
- Platforms
- Industry
- IT Services
- Location
- United States
- Transaction Type
- Growth capital
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