Onto Innovation Acquires Lumina Instruments and Kulicke & Soffa Lithography Business
October 31, 2024
Onto Innovation Inc. has acquired Lumina Instruments, Inc. (Milpitas, CA) and the lithography business of Kulicke & Soffa Industries, Inc. The tuck‑in acquisitions expand Onto Innovation’s inspection and panel lithography capabilities, add patents and R&D personnel, and are expected to generate up to $100 million of additional annual revenue within three years.
- Buyers
- Onto Innovation Inc.
- Targets
- Lumina Instruments, Inc., Lithography business of Kulicke and Soffa Industries, Inc.
- Sellers
- Kulicke and Soffa Industries, Inc.
- Industry
- Manufacturing
- Location
- California, United States
- Transaction Type
- Buyout
Explore More
Related Acquisitions
-
Onto Innovation Completes 27% Minority Investment in Rigaku Holdings
August 10, 2026
IT Services
Onto Innovation completed its previously announced acquisition of a 27% minority equity stake in Rigaku Holdings Corporation. The investment, from Atom Investment, L.P. (an affiliate of Carlyle), is intended to deepen collaboration for next-generation X-ray based process control solutions for semiconductor manufacturing.
-
Onto Innovation Completes Acquisition of Materials Analysis Product Lines from Semilab International
February 19, 2026
Manufacturing
Onto Innovation completed the acquisition of key materials composition and electrical analysis product lines from Semilab International (including Semilab USA LLC), expanding Onto’s materials-analysis and metrology capabilities for the semiconductor market. The transaction (announced June 2025; completed November 17, 2025) augments Onto’s product portfolio and team and was disclosed alongside Onto’s fourth-quarter and full-year 2025 results.
-
Luna Innovations Acquires LIOS Sensing from NKT Photonics
March 14, 2022
Manufacturing
Luna Innovations Incorporated (NASDAQ: LUNA) has acquired LIOS Sensing, a division of NKT Photonics, for €20 million in cash. The acquisition adds LIOS's distributed fiber-optic temperature and strain sensing technology and international customers to Luna's portfolio, expanding Luna's sensing capabilities and global presence.
-
Luminar Technologies Acquires OptoGration Inc.
July 19, 2021
Manufacturing
Luminar Technologies has acquired its exclusive InGaAs photodetector design partner and specialized fabrication partner, OptoGration Inc., securing chip IP and production capacity to support series production of its Iris lidar sensor. The deal brings OptoGration’s founders into Luminar, secures roughly one million InGaAs chips per year capacity (expandable), and deepens integration with Luminar’s Black Forest Engineering assets to accelerate production and reduce costs.
-
Kulicke & Soffa Acquires Uniqarta
February 3, 2021
Manufacturing
Kulicke & Soffa Industries, Inc. acquired 100% of Uniqarta, Inc., a Cambridge, Massachusetts–based developer of Laser-Enabled Advanced Placement (LEAP) LED die-transfer technology, including its patent portfolio and IP. The acquisition expands K&S’s mini- and micro-LED capabilities and is intended to accelerate commercialization and customer qualifications of next-generation high-accuracy LED placement systems for display manufacturers.
-
Luna Innovations Acquires General Photonics
March 4, 2019
Telecommunications
Luna Innovations Incorporated acquired General Photonics Corporation, a Chino, California-based provider of polarization management components, modules and optical test equipment, for $20 million (including up to $1 million earnout). The purchase expands Luna's Lightwave division and strengthens its communications test product portfolio by adding complementary measurement and polarization control capabilities and vertical integration synergies.
Build a buyer list for your deal
Find active buyers from recent acquisition patterns and move straight into outreach.